Ultrafast spectroscopy of super high frequency mechanical modes of doubly clamped beams
نویسندگان
چکیده
of doubly clamped beams Oliver Ristow, Moritz Merklein, Martin Grossmann, Mike Hettich, Martin Schubert, Axel Bruchhausen, Jochen Grebing, Artur Erbe, Denis Mounier, Vitalyi Gusev, Elke Scheer, Thomas Dekorsy, and Elaine C. S. Barretto Department of Physics and Center of Applied Photonics, University of Konstanz, D-78457 Konstanz, Germany Helmholtz-Zentrum Dresden Rossendorf, Institute of Ion-Beam Physics and Materials Research, D-01328 Dresden, Germany IMMM, UMR-CNRS 6283, ENSIM, PRES UNAM, Universit e du Maine, 72085 Le Mans, France LAUM, UMR-CNRS 6613, PRES UNAM, Universit e du Maine, 72085 Le Mans, France
منابع مشابه
Modeling of the Effect of Process Variations on a Micromachined Doubly-Clamped Beam
In the fabrication of micro-electro-mechanical systems (MEMS) devices, manufacturing process variations are usually involved. For these devices sensitive to process variations such as doubly-clamped beams, mismatches between designs and final products will exist. As a result, it underlies yield problems and will be determined by design parameter ranges and distribution functions. Topographical ...
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